Piezo Z-Stage
Part number: 00-55-550-0810
Additional Information
- Incl. controller EBD-060310
- Travel range: 500 µm
- Resolution: 5 nm / 31 nm
- Repeatability: 50 nm
- Compatible with nearly all Märzhäuser scanning stages in the SCAN IM series
- Direct connection between Piezo controller and TANGO controllers with AUX I/O
- Dynamic Z-motion with travel ranges up to 500 µm
- Highly dynamic scanning sequences can be realized by means of trigger functionality